Convert Cubic Centimeters per Minute to sccm

Formula

sccm = cm³/min × 1

Derivation from SI units:

• 1 cm³/min = 10⁻⁶ m³ ÷ 60 s
• 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
• 1 cm³/min = 1.666666666667 × 10⁻⁸ m³/s ÷ 1.666666666667 × 10⁻⁸ m³/s per sccm = 1 sccm
• Standard ↔ actual: Q_actual = Q_standard × (T_actual / T_ref) × (P_ref / P_actual), absolute T and P.

Both units are defined exactly, so the factor is exact. Cubic Centimeter per Minute definition: cubic centimeter per minute; sccm definition: sccm.

Worked examples

1. A bubble-meter reading of 100 cm³/min taken at the reference conditions is 100 sccm.
   100 cm³/min × 1 = 100 sccm
2. 20 cm³/min of actual flow at reference conditions is 20 sccm.
   20 cm³/min × 1 = 20 sccm

Where it's used

Bubble meters and piston provers measure actual volume, so their cm³/min readings must be corrected for temperature and pressure before comparing them with a mass flow controller set in sccm.

Cubic Centimeter per Minute to other flow rate units

Frequently asked questions

Sources

• The International System of Units (SI), 9th edition (SI Brochure), Bureau International des Poids et Mesures , Table 2 and Table 8 (minute).
• SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
• Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).

Last reviewed: 2026-10-15. Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.