Convert sccm to SLPM
1 sccm equals 0.001 SLPM.
1 sccm = 0.001 SLPM
Type in either box. Scientific notation works: 1.5e-3.
Converting a list? Use the bulk sccm to SLPM converter to paste a column from Excel.
How to Convert sccm to SLPM
- 1 sccm = 0.001 SLPM
- 1 SLPM = 1000 sccm
- Example: convert 15 sccm to SLPM: 15 sccm = 15 × 0.001 SLPM = 0.015 SLPM
Reference conditions. sccm: Standard flow: volume the gas would occupy at the standard reference conditions (default 0 °C, 101.325 kPa). Converting to actual flow needs the actual temperature and pressure. SLPM: Standard flow: volume the gas would occupy at the standard reference conditions (default 0 °C, 101.325 kPa). Converting to actual flow needs the actual temperature and pressure.
Formula
SLPM = sccm ÷ 1000
Derivation from SI units:
- 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
- 1 SLPM = 10⁻³ m³ ÷ 60 s, measured at standard reference conditions
- 1 sccm = 1.666666666667 × 10⁻⁸ m³/s ÷ 0.00001666666666667 m³/s per SLPM = 0.001 SLPM
Both units are defined exactly, so the factor is exact. sccm definition: sccm; SLPM definition: SLPM.
Worked examples
- 1000 sccm is exactly 1 SLPM.
1000 sccm × 0.001 = 1 SLPM - A mass flow controller set to 250 sccm delivers 0.25 SLPM.
250 sccm × 0.001 = 0.25 SLPM
sccm to SLPM conversion table
| sccm | SLPM |
|---|---|
| 1 sccm | 0.001 SLPM |
| 2 sccm | 0.002 SLPM |
| 5 sccm | 0.005 SLPM |
| 10 sccm | 0.01 SLPM |
| 20 sccm | 0.02 SLPM |
| 50 sccm | 0.05 SLPM |
| 100 sccm | 0.1 SLPM |
| 200 sccm | 0.2 SLPM |
| 500 sccm | 0.5 SLPM |
| 1000 sccm | 1 SLPM |
| 2000 sccm | 2 SLPM |
| 5000 sccm | 5 SLPM |
| 10000 sccm | 10 SLPM |
| 20000 sccm | 20 SLPM |
| 50000 sccm | 50 SLPM |
Where it's used
Both units refer to the same standard conditions, so the conversion is a factor of 1000, exactly as between cm³ and L. Check that both instruments use the same reference temperature.
sccm to other flow rate units
| Conversion | 1 sccm equals |
|---|---|
| sccm to cubic meter per second | 1.666666667 × 10⁻⁸ m³/s |
| sccm to cubic meter per hour | 0.00006 m³/h |
| sccm to liter per second | 0.00001666666667 L/s |
| sccm to liter per minute | 0.001 L/min |
| sccm to cubic centimeter per second | 0.01666666667 cm³/s |
| sccm to cubic centimeter per minute | 1 cm³/min |
| sccm to SLPM | 0.001 SLPM |
| sccm to cubic foot per minute | 0.00003531466672 CFM |
| sccm to US gallon per minute | 0.0002641720524 GPM |
Frequently asked questions
How many sccm are in 1 SLPM?
Exactly 1000 sccm, provided both use the same reference conditions.
How many SLPM are in 1 sccm?
1 sccm = 0.001 SLPM.
How do I convert sccm to SLPM?
Multiply the value in sccm by 0.001, or divide it by 1000. For example, 15 sccm × 0.001 = 0.015 SLPM.
Is the sccm to SLPM conversion exact?
Yes. Both units are defined exactly, and 1 sccm is exactly 0.001 SLPM.
Sources
- SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
- Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).
- ISO 6358-1:2013 Pneumatic fluid power — Determination of flow-rate characteristics of components using compressible fluids, International Organization for Standardization .
Last reviewed: . Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.
Cite this page
APA
Scientific Converters. (2026, October 15). Convert sccm to SLPM. Retrieved October 17, 2026, from https://scientificconverters.com/flow-rate/sccm-to-slpm/
IEEE
Scientific Converters, "Convert sccm to SLPM," scientificconverters.com. Accessed: Oct. 17, 2026. [Online]. Available: https://scientificconverters.com/flow-rate/sccm-to-slpm/