Convert SLPM to sccm
1 SLPM equals 1000 sccm.
1 SLPM = 1000 sccm
Type in either box. Scientific notation works: 1.5e-3.
Converting a list? Use the bulk SLPM to sccm converter to paste a column from Excel.
How to Convert SLPM to sccm
- 1 SLPM = 1000 sccm
- 1 sccm = 0.001 SLPM
- Example: convert 15 SLPM to sccm: 15 SLPM = 15 × 1000 sccm = 15000 sccm
Reference conditions. SLPM: Standard flow: volume the gas would occupy at the standard reference conditions (default 0 °C, 101.325 kPa). Converting to actual flow needs the actual temperature and pressure. sccm: Standard flow: volume the gas would occupy at the standard reference conditions (default 0 °C, 101.325 kPa). Converting to actual flow needs the actual temperature and pressure.
Formula
sccm = SLPM × 1000
Derivation from SI units:
- 1 SLPM = 10⁻³ m³ ÷ 60 s, measured at standard reference conditions
- 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
- 1 SLPM = 0.00001666666666667 m³/s ÷ 1.666666666667 × 10⁻⁸ m³/s per sccm = 1000 sccm
Both units are defined exactly, so the factor is exact. SLPM definition: SLPM; sccm definition: sccm.
Worked examples
- A 0.5 SLPM nitrogen purge equals 500 sccm.
0.5 SLPM × 1000 = 500 sccm - A 5 SLPM MFC range is 5000 sccm.
5 SLPM × 1000 = 5000 sccm
SLPM to sccm conversion table
| SLPM | sccm |
|---|---|
| 0.1 SLPM | 100 sccm |
| 0.2 SLPM | 200 sccm |
| 0.5 SLPM | 500 sccm |
| 1 SLPM | 1000 sccm |
| 2 SLPM | 2000 sccm |
| 5 SLPM | 5000 sccm |
| 10 SLPM | 10000 sccm |
| 20 SLPM | 20000 sccm |
| 30 SLPM | 30000 sccm |
| 50 SLPM | 50000 sccm |
| 100 SLPM | 100000 sccm |
| 200 SLPM | 200000 sccm |
| 500 SLPM | 500000 sccm |
| 1000 SLPM | 1000000 sccm |
Where it's used
Larger mass-flow ranges in SLPM are converted to sccm to compare with small-range controllers or to set recipes that use sccm.
SLPM to other flow rate units
| Conversion | 1 SLPM equals |
|---|---|
| SLPM to cubic meter per second | 0.00001666666667 m³/s |
| SLPM to cubic meter per hour | 0.06 m³/h |
| SLPM to liter per second | 0.01666666667 L/s |
| SLPM to liter per minute | 1 L/min |
| SLPM to cubic centimeter per second | 16.66666667 cm³/s |
| SLPM to cubic centimeter per minute | 1000 cm³/min |
| SLPM to sccm | 1000 sccm |
| SLPM to cubic foot per minute | 0.03531466672 CFM |
| SLPM to US gallon per minute | 0.2641720524 GPM |
Frequently asked questions
Why do MFC datasheets use sccm and SLPM?
They are standard (mass-equivalent) flows that stay constant when line pressure or temperature changes; sccm is used for small ranges and SLPM for larger ones.
How many sccm are in 1 SLPM?
1 SLPM = 1000 sccm.
How do I convert SLPM to sccm?
Multiply the value in SLPM by 1000. For example, 15 SLPM × 1000 = 15000 sccm.
Is the SLPM to sccm conversion exact?
Yes. Both units are defined exactly, and 1 SLPM is exactly 1000 sccm.
Sources
- SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
- ISO 6358-1:2013 Pneumatic fluid power — Determination of flow-rate characteristics of components using compressible fluids, International Organization for Standardization .
- Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).
Last reviewed: . Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.
Cite this page
APA
Scientific Converters. (2026, October 15). Convert SLPM to sccm. Retrieved October 17, 2026, from https://scientificconverters.com/flow-rate/slpm-to-sccm/
IEEE
Scientific Converters, "Convert SLPM to sccm," scientificconverters.com. Accessed: Oct. 17, 2026. [Online]. Available: https://scientificconverters.com/flow-rate/slpm-to-sccm/