sccm
The standard cubic centimetre per minute (sccm) is the gas flow that would occupy one cubic centimetre per minute at standard reference conditions. It is effectively a mass flow, because it does not change with line pressure or temperature.
Symbol: sccm
Quantity: volumetric flow rate (volume per unit time)
SI relation: 1 sccm = 1.666666666667 × 10⁻⁸ m³/s (exact)
Derivation: 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
Exact: yes, by definition
Reference conditions. Standard flow: volume the gas would occupy at the standard reference conditions (default 0 °C, 101.325 kPa). Converting to actual flow needs the actual temperature and pressure.
History
Thermal mass flow controllers made sccm the common unit in semiconductor processing. SEMI E12 uses 0 °C and 101.325 kPa, but some manufacturers reference 20 °C or 21.1 °C (70 °F), so always check the datasheet.
Typical uses
- Mass flow controllers in semiconductor, vacuum and coating processes
- Leak testing
- Gas blending and calibration
Convert sccm to other units
| Conversion | 1 sccm equals | Reverse |
|---|---|---|
| sccm to cubic meter per hour | 0.00006 m³/h | cubic meter per hour to sccm |
| sccm to liter per second | 0.00001666666667 L/s | liter per second to sccm |
| sccm to liter per minute | 0.001 L/min | liter per minute to sccm |
| sccm to cubic foot per minute | 0.00003531466672 CFM | cubic foot per minute to sccm |
| sccm to US gallon per minute | 0.0002641720524 GPM | US gallon per minute to sccm |
| sccm to cubic meter per second | 1.666666667 × 10⁻⁸ m³/s | cubic meter per second to sccm |
| sccm to cubic centimeter per minute | 1 cm³/min | cubic centimeter per minute to sccm |
| sccm to SLPM | 0.001 SLPM | SLPM to sccm |
| sccm to cubic centimeter per second | 0.01666666667 cm³/s | cubic centimeter per second to sccm |
Open the Flow Rate Converter to convert any value between all units.
Sources
- SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
- Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).
Last reviewed: . Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.
Cite this page
APA
Scientific Converters. (2026, October 15). sccm. Retrieved October 17, 2026, from https://scientificconverters.com/units/sccm/
IEEE
Scientific Converters, "sccm," scientificconverters.com. Accessed: Oct. 17, 2026. [Online]. Available: https://scientificconverters.com/units/sccm/