Convert Liters per Minute to sccm

Formula

sccm = L/min × 1000

Derivation from SI units:

• 1 L/min = 10⁻³ m³ ÷ 60 s
• 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
• 1 L/min = 0.00001666666666667 m³/s ÷ 1.666666666667 × 10⁻⁸ m³/s per sccm = 1000 sccm
• Standard ↔ actual: Q_actual = Q_standard × (T_actual / T_ref) × (P_ref / P_actual), absolute T and P.

Both units are defined exactly, so the factor is exact. Liter per Minute definition: liter per minute; sccm definition: sccm.

Worked examples

1. A reading of 6 L/min converts to 6000 sccm.
   6 L/min × 1000 = 6000 sccm
2. A value of 40 L/min is 40000 sccm.
   40 L/min × 1000 = 40000 sccm

Where it's used

Liters per Minute are used for medical oxygen and anaesthesia gas flow, while sccm appear in mass flow controllers in semiconductor, vacuum and coating processes. Both measure volumetric flow rate (volume per unit time), so the conversion is a fixed factor.

Liter per Minute to other flow rate units

Frequently asked questions

Sources

• The International System of Units (SI), 9th edition (SI Brochure), Bureau International des Poids et Mesures , Table 8 (litre, minute).
• SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
• Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).

Last reviewed: 2026-10-15. Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.