Convert Cubic Meters per Hour to sccm (m3/h to sccm)

Formula

sccm = m³/h × 16666.66666667

Derivation from SI units:

• 1 m³/h = 1 m³ ÷ 3600 s
• 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
• 1 m³/h = 0.0002777777777778 m³/s ÷ 1.666666666667 × 10⁻⁸ m³/s per sccm = 16666.66666667 sccm
• Standard ↔ actual: Q_actual = Q_standard × (T_actual / T_ref) × (P_ref / P_actual), absolute T and P.

Both units are defined exactly, so the factor is exact. Cubic Meter per Hour definition: cubic meter per hour; sccm definition: sccm.

Worked examples

1. A reading of 150 m³/h converts to 2500000 sccm.
   150 m³/h × 16666.66667 = 2500000 sccm
2. A value of 1500 m³/h is 25000000 sccm.
   1500 m³/h × 16666.66667 = 25000000 sccm

Where it's used

Cubic Meters per Hour are used for air-handling unit and fan ratings in Europe and Asia, while sccm appear in mass flow controllers in semiconductor, vacuum and coating processes. Both measure volumetric flow rate (volume per unit time), so the conversion is a fixed factor.

Cubic Meter per Hour to other flow rate units

Frequently asked questions

Sources

• The International System of Units (SI), 9th edition (SI Brochure), Bureau International des Poids et Mesures , Table 8 (hour) with Table 2 (cubic metre).
• SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
• Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).

Last reviewed: 2026-10-15. Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.