Convert sccm to Cubic Meters per Hour

Formula

m³/h = sccm × 0.00006

or m³/h = sccm ÷ 16666.66666667

Derivation from SI units:

• 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
• 1 m³/h = 1 m³ ÷ 3600 s
• 1 sccm = 1.666666666667 × 10⁻⁸ m³/s ÷ 0.0002777777777778 m³/s per m³/h = 0.00006 m³/h
• Standard ↔ actual: Q_actual = Q_standard × (T_actual / T_ref) × (P_ref / P_actual), absolute T and P.

Both units are defined exactly, so the factor is exact. sccm definition: sccm; Cubic Meter per Hour definition: cubic meter per hour.

Worked examples

1. A reading of 50 sccm converts to 0.003 m³/h.
   50 sccm × 0.00006 = 0.003 m³/h
2. A value of 2000 sccm is 0.12 m³/h.
   2000 sccm × 0.00006 = 0.12 m³/h

Where it's used

sccm are used for mass flow controllers in semiconductor, vacuum and coating processes, while cubic meters per hour appear in air-handling unit and fan ratings in Europe and Asia. Both measure volumetric flow rate (volume per unit time), so the conversion is a fixed factor.

sccm to other flow rate units

Frequently asked questions

Sources

• SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
• Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).
• The International System of Units (SI), 9th edition (SI Brochure), Bureau International des Poids et Mesures , Table 8 (hour) with Table 2 (cubic metre).

Last reviewed: 2026-10-15. Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.