Convert sccm to Cubic Meters per Second

Formula

m³/s = sccm × 1.666666666667 × 10⁻⁸

or m³/s = sccm ÷ 60000000

Derivation from SI units:

• 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
• 1 m³/s = 1 m³ ÷ 1 s
• Standard ↔ actual: Q_actual = Q_standard × (T_actual / T_ref) × (P_ref / P_actual), absolute T and P.

Both units are defined exactly, so the factor is exact. sccm definition: sccm; Cubic Meter per Second definition: cubic meter per second.

Worked examples

1. A reading of 50 sccm converts to 8.333333333 × 10⁻⁷ m³/s.
   50 sccm × 1.666666667 × 10⁻⁸ = 8.333333333 × 10⁻⁷ m³/s
2. A value of 2000 sccm is 0.00003333333333 m³/s.
   2000 sccm × 1.666666667 × 10⁻⁸ = 0.00003333333333 m³/s

Where it's used

sccm are used for mass flow controllers in semiconductor, vacuum and coating processes, while cubic meters per second appear in river and channel discharge. Both measure volumetric flow rate (volume per unit time), so the conversion is a fixed factor.

sccm to other flow rate units

Frequently asked questions

Sources

• SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
• Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).
• The International System of Units (SI), 9th edition (SI Brochure), Bureau International des Poids et Mesures , Table 2, coherent derived units.

Last reviewed: 2026-10-15. Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.