Convert sccm to Cubic Centimeters per Second

Formula

cm³/s = sccm × 0.01666666666667

or cm³/s = sccm ÷ 60

Derivation from SI units:

• 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
• 1 cm³/s = 10⁻⁶ m³ ÷ 1 s
• 1 sccm = 1.666666666667 × 10⁻⁸ m³/s ÷ 0.000001 m³/s per cm³/s = 0.01666666666667 cm³/s
• Standard ↔ actual: Q_actual = Q_standard × (T_actual / T_ref) × (P_ref / P_actual), absolute T and P.

Both units are defined exactly, so the factor is exact. sccm definition: sccm; Cubic Centimeter per Second definition: cubic centimeter per second.

Worked examples

1. A reading of 50 sccm converts to 0.8333333333 cm³/s.
   50 sccm × 0.01666666667 = 0.8333333333 cm³/s
2. A value of 2000 sccm is 33.33333333 cm³/s.
   2000 sccm × 0.01666666667 = 33.33333333 cm³/s

Where it's used

sccm are used for mass flow controllers in semiconductor, vacuum and coating processes, while cubic centimeters per second appear in air permeability testers that report flow before dividing by area. Both measure volumetric flow rate (volume per unit time), so the conversion is a fixed factor.

sccm to other flow rate units

Frequently asked questions

Sources

• SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
• Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).
• The International System of Units (SI), 9th edition (SI Brochure), Bureau International des Poids et Mesures , Table 2 with SI prefix centi.

Last reviewed: 2026-10-15. Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.