Convert Cubic Centimeters per Second to sccm

Formula

sccm = cm³/s × 60

Derivation from SI units:

• 1 cm³/s = 10⁻⁶ m³ ÷ 1 s
• 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
• 1 cm³/s = 0.000001 m³/s ÷ 1.666666666667 × 10⁻⁸ m³/s per sccm = 60 sccm
• Standard ↔ actual: Q_actual = Q_standard × (T_actual / T_ref) × (P_ref / P_actual), absolute T and P.

Both units are defined exactly, so the factor is exact. Cubic Centimeter per Second definition: cubic centimeter per second; sccm definition: sccm.

Worked examples

1. A reading of 2 cm³/s converts to 120 sccm.
   2 cm³/s × 60 = 120 sccm
2. A value of 50 cm³/s is 3000 sccm.
   50 cm³/s × 60 = 3000 sccm

Where it's used

Cubic Centimeters per Second are used for air permeability testers that report flow before dividing by area, while sccm appear in mass flow controllers in semiconductor, vacuum and coating processes. Both measure volumetric flow rate (volume per unit time), so the conversion is a fixed factor.

Cubic Centimeter per Second to other flow rate units

Frequently asked questions

Sources

• The International System of Units (SI), 9th edition (SI Brochure), Bureau International des Poids et Mesures , Table 2 with SI prefix centi.
• SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
• Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).

Last reviewed: 2026-10-15. Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.