Convert sccm to Cubic Feet per Minute

Formula

CFM = sccm × 0.00003531466672149

or CFM = sccm ÷ 28316.846592

Derivation from SI units:

• 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
• 1 CFM = (0.3048 m)³ ÷ 60 s = 4.719474432 × 10⁻⁴ m³/s
• 1 sccm = 1.666666666667 × 10⁻⁸ m³/s ÷ 0.0004719474432 m³/s per CFM = 0.00003531466672149 CFM
• Standard ↔ actual: Q_actual = Q_standard × (T_actual / T_ref) × (P_ref / P_actual), absolute T and P.

Both units are defined exactly, so the factor is exact. sccm definition: sccm; Cubic Foot per Minute definition: cubic foot per minute.

Worked examples

1. A reading of 50 sccm converts to 0.001765733336 CFM.
   50 sccm × 0.00003531466672 = 0.001765733336 CFM
2. A value of 2000 sccm is 0.07062933344 CFM.
   2000 sccm × 0.00003531466672 = 0.07062933344 CFM

Where it's used

sccm are used for mass flow controllers in semiconductor, vacuum and coating processes, while cubic feet per minute appear in US HVAC airflow (about 400 CFM per ton of cooling). Both measure volumetric flow rate (volume per unit time), so the conversion is a fixed factor.

sccm to other flow rate units

Frequently asked questions

Sources

• SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
• Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).
• Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Appendix B.8, "cubic foot per minute (ft³/min)".

Last reviewed: 2026-10-15. Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.