Convert Cubic Feet per Minute to sccm

Formula

sccm = CFM × 28316.846592

Derivation from SI units:

• 1 CFM = (0.3048 m)³ ÷ 60 s = 4.719474432 × 10⁻⁴ m³/s
• 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
• 1 CFM = 0.0004719474432 m³/s ÷ 1.666666666667 × 10⁻⁸ m³/s per sccm = 28316.846592 sccm
• Standard ↔ actual: Q_actual = Q_standard × (T_actual / T_ref) × (P_ref / P_actual), absolute T and P.

Both units are defined exactly, so the factor is exact. Cubic Foot per Minute definition: cubic foot per minute; sccm definition: sccm.

Worked examples

1. A reading of 100 CFM converts to 2831684.659 sccm.
   100 CFM × 28316.84659 = 2831684.659 sccm
2. A value of 800 CFM is 22653477.27 sccm.
   800 CFM × 28316.84659 = 22653477.27 sccm

Where it's used

Cubic Feet per Minute are used for US HVAC airflow (about 400 CFM per ton of cooling), while sccm appear in mass flow controllers in semiconductor, vacuum and coating processes. Both measure volumetric flow rate (volume per unit time), so the conversion is a fixed factor.

Cubic Foot per Minute to other flow rate units

Frequently asked questions

Sources

• Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Appendix B.8, "cubic foot per minute (ft³/min)".
• SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
• Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).

Last reviewed: 2026-10-15. Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.