Convert sccm to Liters per Second
1 sccm equals 0.00001666666667 liters per second (L/s), at the reference conditions 0 °C and 101.325 kPa, with the gas at those conditions.
1 sccm = 0.00001666666667 L/s
Type in either box. Scientific notation works: 1.5e-3.
Converting a list? Use the bulk sccm to liter per second converter to paste a column from Excel.
How to Convert sccm to Liter per Second
- 1 sccm = 0.00001666666667 L/s
- 1 L/s = 60000 sccm
- Example: convert 15 sccm to L/s: 15 sccm = 15 × 0.00001666666667 L/s = 0.00025 L/s
Reference conditions. sccm: Standard flow: volume the gas would occupy at the standard reference conditions (default 0 °C, 101.325 kPa). Converting to actual flow needs the actual temperature and pressure.
Standard vs actual flow. The values above assume the gas is at the standard reference conditions (0 °C, 101.325 kPa). Set the actual temperature and pressure in the converter to get the real volumetric flow.
Formula
L/s = sccm × 0.00001666666666667
or L/s = sccm ÷ 60000
Derivation from SI units:
- 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
- 1 L/s = 10⁻³ m³ ÷ 1 s
- 1 sccm = 1.666666666667 × 10⁻⁸ m³/s ÷ 0.001 m³/s per L/s = 0.00001666666666667 L/s
- Standard ↔ actual: Q_actual = Q_standard × (T_actual / T_ref) × (P_ref / P_actual), absolute T and P.
Both units are defined exactly, so the factor is exact. sccm definition: sccm; Liter per Second definition: liter per second.
Worked examples
- A reading of 50 sccm converts to 0.0008333333333 L/s.
50 sccm × 0.00001666666667 = 0.0008333333333 L/s - A value of 2000 sccm is 0.03333333333 L/s.
2000 sccm × 0.00001666666667 = 0.03333333333 L/s
sccm to Liter per Second conversion table
| sccm | Liters per Second (L/s) |
|---|---|
| 1 sccm | 0.00001666666667 L/s |
| 2 sccm | 0.00003333333333 L/s |
| 5 sccm | 0.00008333333333 L/s |
| 10 sccm | 0.0001666666667 L/s |
| 20 sccm | 0.0003333333333 L/s |
| 50 sccm | 0.0008333333333 L/s |
| 100 sccm | 0.001666666667 L/s |
| 200 sccm | 0.003333333333 L/s |
| 500 sccm | 0.008333333333 L/s |
| 1000 sccm | 0.01666666667 L/s |
| 2000 sccm | 0.03333333333 L/s |
| 5000 sccm | 0.08333333333 L/s |
| 10000 sccm | 0.1666666667 L/s |
| 20000 sccm | 0.3333333333 L/s |
| 50000 sccm | 0.8333333333 L/s |
Where it's used
sccm are used for mass flow controllers in semiconductor, vacuum and coating processes, while liters per second appear in ventilation rates per person (ASHRAE 62.1, EN 16798). Both measure volumetric flow rate (volume per unit time), so the conversion is a fixed factor.
sccm to other flow rate units
| Conversion | 1 sccm equals |
|---|---|
| sccm to cubic meter per second | 1.666666667 × 10⁻⁸ m³/s |
| sccm to cubic meter per hour | 0.00006 m³/h |
| sccm to liter per second | 0.00001666666667 L/s |
| sccm to liter per minute | 0.001 L/min |
| sccm to cubic centimeter per second | 0.01666666667 cm³/s |
| sccm to cubic centimeter per minute | 1 cm³/min |
| sccm to SLPM | 0.001 SLPM |
| sccm to cubic foot per minute | 0.00003531466672 CFM |
| sccm to US gallon per minute | 0.0002641720524 GPM |
Frequently asked questions
How many liters per second are in 1 sccm?
1 sccm = 0.00001666666667 L/s (reference conditions 0 °C and 101.325 kPa, with the gas at those conditions).
How do I convert sccm to liters per second?
Multiply the value in sccm by 0.00001666666667, or divide it by 60000. For example, 15 sccm × 0.00001666666667 = 0.00025 L/s.
Is the sccm to L/s conversion exact?
Yes. Both units are defined exactly, so the ratio is exact; its decimal form does not terminate and is shown here to 10 significant figures (more with the precision selector).
Sources
- SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
- Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).
- The International System of Units (SI), 9th edition (SI Brochure), Bureau International des Poids et Mesures , Table 8 (litre).
Last reviewed: . Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.
Cite this page
APA
Scientific Converters. (2026, October 15). Convert sccm to Liters per Second. Retrieved October 17, 2026, from https://scientificconverters.com/flow-rate/sccm-to-liters-per-second/
IEEE
Scientific Converters, "Convert sccm to Liters per Second," scientificconverters.com. Accessed: Oct. 17, 2026. [Online]. Available: https://scientificconverters.com/flow-rate/sccm-to-liters-per-second/