Convert sccm to Cubic Centimeters per Minute

Formula

cm³/min = sccm × 1

Derivation from SI units:

• 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
• 1 cm³/min = 10⁻⁶ m³ ÷ 60 s
• 1 sccm = 1.666666666667 × 10⁻⁸ m³/s ÷ 1.666666666667 × 10⁻⁸ m³/s per cm³/min = 1 cm³/min
• Standard ↔ actual: Q_actual = Q_standard × (T_actual / T_ref) × (P_ref / P_actual), absolute T and P.

Both units are defined exactly, so the factor is exact. sccm definition: sccm; Cubic Centimeter per Minute definition: cubic centimeter per minute.

Worked examples

1. With the gas at the reference conditions, 100 sccm is 100 cm³/min of actual flow.
   100 sccm × 1 = 100 cm³/min
2. 500 sccm delivered into a line at reference conditions is 500 cm³/min.
   500 sccm × 1 = 500 cm³/min

Where it's used

sccm is a standard flow and cm³/min is an actual flow. They are equal only when the gas is at the reference conditions; at a higher temperature or lower pressure the actual volume is larger. Use the condition fields in the converter to convert at your line conditions.

sccm to other flow rate units

Frequently asked questions

Sources

• SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
• Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).
• The International System of Units (SI), 9th edition (SI Brochure), Bureau International des Poids et Mesures , Table 2 and Table 8 (minute).

Last reviewed: 2026-10-15. Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.