Convert Cubic Meters per Second to sccm

Formula

sccm = m³/s × 60000000

Derivation from SI units:

• 1 m³/s = 1 m³ ÷ 1 s
• 1 sccm = 10⁻⁶ m³ ÷ 60 s, measured at standard reference conditions
• Standard ↔ actual: Q_actual = Q_standard × (T_actual / T_ref) × (P_ref / P_actual), absolute T and P.

Both units are defined exactly, so the factor is exact. Cubic Meter per Second definition: cubic meter per second; sccm definition: sccm.

Worked examples

1. A reading of 0.5 m³/s converts to 30000000 sccm.
   0.5 m³/s × 60000000 = 30000000 sccm
2. A value of 10 m³/s is 600000000 sccm.
   10 m³/s × 60000000 = 600000000 sccm

Where it's used

Cubic Meters per Second are used for river and channel discharge, while sccm appear in mass flow controllers in semiconductor, vacuum and coating processes. Both measure volumetric flow rate (volume per unit time), so the conversion is a fixed factor.

Cubic Meter per Second to other flow rate units

Frequently asked questions

Sources

• The International System of Units (SI), 9th edition (SI Brochure), Bureau International des Poids et Mesures , Table 2, coherent derived units.
• SEMI E12 Guide for Standard Temperature and Pressure Used in the Measurement of Mass Flow, SEMI , standard conditions 0 °C, 101.325 kPa.
• Guide for the Use of the International System of Units (SI), NIST Special Publication 811, 2008 Edition, National Institute of Standards and Technology , Section 7.5 (reference conditions).

Last reviewed: 2026-10-15. Factors are stored exactly and computed with 50-digit decimal arithmetic. See how we verify conversion factors.